Pure Mo/Si multilayers

Pure Mo/Si multilayers show the following characteristics:

• Formation of intermixing zones of different thicknesses on Mo-on-Si and Si-on-Mo interfaces (fig. 2)
• Morphology: Mo polycrystalline, MoSi_x and Si amorphous
• Description of the multilayer as a 4-layer system
• Maximum EUV reflectivity at l=13.4nm and a=1.5°: 68.7% (fig. 3)

Fig. 2: TEM cross section of a pure Mo/Si multilayer (d_period=6.85nm).

Fig. 3: EUV reflectivity of pure Mo/Si multilayers (measured at PTB/BESSY2).